▮Safety design(Enclosure)
▮Applied Material According to specified gas
▮100%E.P Internal Surface
▮Particle free
▮Leakage rate: 1*100-9Atm CCC（He）
▮Maintain high purity during operation
▮PLC controller&Touch panel
▮Easy operation&Maintenace
▮Full Auto Cycle process
▮Stafety Interlock
▮Com:RS-232C,422,485,Ethernet
▮For DEZn,the TMA